2/15/2011	10:24:57 AM	Helium valve opened
2/15/2011	10:25:10 AM	Helium valve closed
2/15/2011	11:00:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2011	11:00:31 AM	Recipe started at 11:00 AM
2/15/2011	11:00:31 AM	H2 valve closed
2/15/2011	11:00:31 AM	BCl3 valve closed
2/15/2011	11:00:31 AM	PH3 valve closed
2/15/2011	11:00:31 AM	SiCl4 pre valve closed
2/15/2011	11:00:31 AM	SiCl4 post valve closed
2/15/2011	11:00:31 AM	Main Vac valve closed
2/15/2011	11:00:31 AM	Bypass valve closed
2/15/2011	11:00:31 AM	Bubbler valve closed
2/15/2011	11:00:31 AM	Helium valve opened
2/15/2011	11:00:31 AM	Helium MFC set to  500.000000
2/15/2011	11:00:31 AM	H2 MFC set to  0.000000
2/15/2011	11:00:31 AM	BCl3 MFC set to  0.000000
2/15/2011	11:00:31 AM	PHl3 MFC set to  0.000000
2/15/2011	11:00:31 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:00:31 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:00:31 AM	Tube furnace set to 0
2/15/2011	11:01:52 AM	Helium valve closed
2/15/2011	11:01:52 AM	H2 valve closed
2/15/2011	11:01:52 AM	BCl3 valve closed
2/15/2011	11:01:52 AM	PH3 valve closed
2/15/2011	11:01:52 AM	SiCl4 pre valve closed
2/15/2011	11:01:52 AM	SiCl4 post valve closed
2/15/2011	11:01:52 AM	Main Vac valve closed
2/15/2011	11:01:53 AM	Bypass valve closed
2/15/2011	11:01:53 AM	Bubbler valve closed
2/15/2011	11:01:53 AM	Helium MFC set to  0.000000
2/15/2011	11:01:53 AM	H2 MFC set to  0.000000
2/15/2011	11:01:53 AM	BCl3 MFC set to  0.000000
2/15/2011	11:01:53 AM	PHl3 MFC set to  0.000000
2/15/2011	11:01:53 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:01:53 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:01:53 AM	Tube furnace set to 0
2/15/2011	11:01:53 AM	Run finished at 11:01 AM
2/15/2011	11:01:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2011	11:07:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2011	11:07:50 AM	Recipe started at 11:07 AM
2/15/2011	11:07:50 AM	Helium valve closed
2/15/2011	11:07:50 AM	H2 valve closed
2/15/2011	11:07:50 AM	BCl3 valve closed
2/15/2011	11:07:50 AM	PH3 valve closed
2/15/2011	11:07:50 AM	SiCl4 pre valve closed
2/15/2011	11:07:50 AM	SiCl4 post valve closed
2/15/2011	11:07:50 AM	Main Vac valve closed
2/15/2011	11:07:50 AM	Bubbler valve closed
2/15/2011	11:07:50 AM	Bypass valve opened
2/15/2011	11:07:50 AM	Helium MFC set to  0.000000
2/15/2011	11:07:50 AM	H2 MFC set to  0.000000
2/15/2011	11:07:50 AM	BCl3 MFC set to  0.000000
2/15/2011	11:07:50 AM	PHl3 MFC set to  0.000000
2/15/2011	11:07:50 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:07:50 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:07:50 AM	Tube furnace set to 0
2/15/2011	11:08:21 AM	Helium valve closed
2/15/2011	11:08:21 AM	H2 valve closed
2/15/2011	11:08:21 AM	BCl3 valve closed
2/15/2011	11:08:21 AM	PH3 valve closed
2/15/2011	11:08:21 AM	SiCl4 pre valve closed
2/15/2011	11:08:21 AM	SiCl4 post valve closed
2/15/2011	11:08:21 AM	Bubbler valve closed
2/15/2011	11:08:21 AM	Main Vac valve opened
2/15/2011	11:08:21 AM	Bypass valve opened
2/15/2011	11:08:21 AM	Helium MFC set to  0.000000
2/15/2011	11:08:21 AM	H2 MFC set to  0.000000
2/15/2011	11:08:21 AM	BCl3 MFC set to  0.000000
2/15/2011	11:08:21 AM	PHl3 MFC set to  0.000000
2/15/2011	11:08:21 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:08:21 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:08:21 AM	Tube furnace set to 0
2/15/2011	11:08:22 AM	Run finished at 11:08 AM
2/15/2011	11:08:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2011	11:10:22 AM	Helium MFC set to  100.000000
2/15/2011	11:10:23 AM	Helium valve opened
2/15/2011	11:10:28 AM	Helium valve closed
2/15/2011	11:11:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2011	11:11:01 AM	Recipe started at 11:11 AM
2/15/2011	11:11:01 AM	H2 valve closed
2/15/2011	11:11:01 AM	BCl3 valve closed
2/15/2011	11:11:01 AM	PH3 valve closed
2/15/2011	11:11:01 AM	SiCl4 pre valve closed
2/15/2011	11:11:01 AM	SiCl4 post valve closed
2/15/2011	11:11:01 AM	Main Vac valve closed
2/15/2011	11:11:01 AM	Bypass valve closed
2/15/2011	11:11:01 AM	Bubbler valve closed
2/15/2011	11:11:01 AM	Helium valve opened
2/15/2011	11:11:01 AM	Helium MFC set to  500.000000
2/15/2011	11:11:01 AM	H2 MFC set to  0.000000
2/15/2011	11:11:01 AM	BCl3 MFC set to  0.000000
2/15/2011	11:11:01 AM	PHl3 MFC set to  0.000000
2/15/2011	11:11:01 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:11:01 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:11:01 AM	Tube furnace set to 0
2/15/2011	11:12:22 AM	Helium valve closed
2/15/2011	11:12:22 AM	H2 valve closed
2/15/2011	11:12:22 AM	BCl3 valve closed
2/15/2011	11:12:22 AM	PH3 valve closed
2/15/2011	11:12:22 AM	SiCl4 pre valve closed
2/15/2011	11:12:22 AM	SiCl4 post valve closed
2/15/2011	11:12:22 AM	Main Vac valve closed
2/15/2011	11:12:22 AM	Bypass valve closed
2/15/2011	11:12:22 AM	Bubbler valve closed
2/15/2011	11:12:22 AM	Helium MFC set to  0.000000
2/15/2011	11:12:22 AM	H2 MFC set to  0.000000
2/15/2011	11:12:22 AM	BCl3 MFC set to  0.000000
2/15/2011	11:12:22 AM	PHl3 MFC set to  0.000000
2/15/2011	11:12:22 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:12:22 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:12:22 AM	Tube furnace set to 0
2/15/2011	11:12:22 AM	Run finished at 11:12 AM
2/15/2011	11:12:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2011	11:15:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2011	11:15:09 AM	Recipe started at 11:15 AM
2/15/2011	11:15:09 AM	Helium valve closed
2/15/2011	11:15:09 AM	H2 valve closed
2/15/2011	11:15:09 AM	BCl3 valve closed
2/15/2011	11:15:09 AM	PH3 valve closed
2/15/2011	11:15:09 AM	SiCl4 pre valve closed
2/15/2011	11:15:09 AM	SiCl4 post valve closed
2/15/2011	11:15:09 AM	Main Vac valve closed
2/15/2011	11:15:09 AM	Bubbler valve closed
2/15/2011	11:15:09 AM	Bypass valve opened
2/15/2011	11:15:09 AM	Helium MFC set to  0.000000
2/15/2011	11:15:09 AM	H2 MFC set to  0.000000
2/15/2011	11:15:09 AM	BCl3 MFC set to  0.000000
2/15/2011	11:15:09 AM	PHl3 MFC set to  0.000000
2/15/2011	11:15:09 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:15:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:15:09 AM	Tube furnace set to 0
2/15/2011	11:15:41 AM	Helium valve closed
2/15/2011	11:15:41 AM	H2 valve closed
2/15/2011	11:15:41 AM	BCl3 valve closed
2/15/2011	11:15:41 AM	PH3 valve closed
2/15/2011	11:15:41 AM	SiCl4 pre valve closed
2/15/2011	11:15:41 AM	SiCl4 post valve closed
2/15/2011	11:15:41 AM	Bubbler valve closed
2/15/2011	11:15:41 AM	Main Vac valve opened
2/15/2011	11:15:41 AM	Bypass valve opened
2/15/2011	11:15:41 AM	Helium MFC set to  0.000000
2/15/2011	11:15:41 AM	H2 MFC set to  0.000000
2/15/2011	11:15:41 AM	BCl3 MFC set to  0.000000
2/15/2011	11:15:41 AM	PHl3 MFC set to  0.000000
2/15/2011	11:15:41 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:15:41 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:15:41 AM	Tube furnace set to 0
2/15/2011	11:15:41 AM	Run finished at 11:15 AM
2/15/2011	11:15:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2011	11:16:53 AM	Helium MFC set to  30.000000
2/15/2011	11:16:54 AM	Helium valve opened
2/15/2011	11:28:36 AM	Helium valve closed
2/15/2011	11:29:22 AM	Helium MFC set to  40.000000
2/15/2011	11:29:22 AM	Helium valve opened
2/15/2011	11:48:36 AM	Helium valve closed
2/15/2011	11:49:42 AM	Recipe started at 11:49 AM
2/15/2011	11:49:42 AM	Helium valve closed
2/15/2011	11:49:42 AM	BCl3 valve closed
2/15/2011	11:49:42 AM	PH3 valve closed
2/15/2011	11:49:42 AM	SiCl4 pre valve closed
2/15/2011	11:49:42 AM	SiCl4 post valve closed
2/15/2011	11:49:42 AM	Main Vac valve closed
2/15/2011	11:49:42 AM	Bypass valve closed
2/15/2011	11:49:42 AM	Bubbler valve closed
2/15/2011	11:49:42 AM	H2 valve opened
2/15/2011	11:49:42 AM	Helium MFC set to  0.000000
2/15/2011	11:49:42 AM	H2 MFC set to  500.000000
2/15/2011	11:49:42 AM	BCl3 MFC set to  0.000000
2/15/2011	11:49:42 AM	PHl3 MFC set to  0.000000
2/15/2011	11:49:42 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:49:42 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:49:43 AM	Tube furnace set to 0
2/15/2011	11:51:06 AM	Helium valve closed
2/15/2011	11:51:06 AM	BCl3 valve closed
2/15/2011	11:51:06 AM	PH3 valve closed
2/15/2011	11:51:06 AM	SiCl4 pre valve closed
2/15/2011	11:51:06 AM	SiCl4 post valve closed
2/15/2011	11:51:06 AM	Main Vac valve closed
2/15/2011	11:51:06 AM	Bypass valve closed
2/15/2011	11:51:06 AM	H2 valve opened
2/15/2011	11:51:06 AM	Bubbler valve opened
2/15/2011	11:51:06 AM	Helium MFC set to  0.000000
2/15/2011	11:51:06 AM	H2 MFC set to  500.000000
2/15/2011	11:51:06 AM	BCl3 MFC set to  0.000000
2/15/2011	11:51:06 AM	PHl3 MFC set to  0.000000
2/15/2011	11:51:06 AM	SiCl4 MFC set to  0.000000
2/15/2011	11:51:06 AM	Bypass solenoid MFC set to  0.000000
2/15/2011	11:51:06 AM	Tube furnace set to 1000
2/15/2011	12:11:06 PM	Helium valve closed
2/15/2011	12:11:06 PM	BCl3 valve closed
2/15/2011	12:11:06 PM	PH3 valve closed
2/15/2011	12:11:06 PM	Main Vac valve closed
2/15/2011	12:11:06 PM	Bypass valve closed
2/15/2011	12:11:06 PM	H2 valve opened
2/15/2011	12:11:06 PM	SiCl4 pre valve opened
2/15/2011	12:11:06 PM	SiCl4 post valve opened
2/15/2011	12:11:06 PM	Bubbler valve opened
2/15/2011	12:11:06 PM	Helium MFC set to  0.000000
2/15/2011	12:11:06 PM	H2 MFC set to  500.000000
2/15/2011	12:11:06 PM	BCl3 MFC set to  0.000000
2/15/2011	12:11:06 PM	PHl3 MFC set to  0.000000
2/15/2011	12:11:06 PM	SiCl4 MFC set to  50.000000
2/15/2011	12:11:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2011	12:11:06 PM	Tube furnace set to 1000
2/15/2011	12:31:06 PM	H2 valve closed
2/15/2011	12:31:06 PM	BCl3 valve closed
2/15/2011	12:31:06 PM	PH3 valve closed
2/15/2011	12:31:06 PM	SiCl4 pre valve closed
2/15/2011	12:31:06 PM	SiCl4 post valve closed
2/15/2011	12:31:06 PM	Main Vac valve closed
2/15/2011	12:31:06 PM	Bypass valve closed
2/15/2011	12:31:06 PM	Helium valve opened
2/15/2011	12:31:06 PM	Bubbler valve opened
2/15/2011	12:31:06 PM	Helium MFC set to  500.000000
2/15/2011	12:31:06 PM	H2 MFC set to  0.000000
2/15/2011	12:31:06 PM	BCl3 MFC set to  0.000000
2/15/2011	12:31:06 PM	PHl3 MFC set to  0.000000
2/15/2011	12:31:06 PM	SiCl4 MFC set to  0.000000
2/15/2011	12:31:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2011	12:31:06 PM	Tube furnace set to 0
2/15/2011	1:03:36 PM	H2 valve closed
2/15/2011	1:03:36 PM	BCl3 valve closed
2/15/2011	1:03:36 PM	PH3 valve closed
2/15/2011	1:03:36 PM	SiCl4 pre valve closed
2/15/2011	1:03:36 PM	SiCl4 post valve closed
2/15/2011	1:03:36 PM	Main Vac valve closed
2/15/2011	1:03:36 PM	Bypass valve closed
2/15/2011	1:03:36 PM	Helium valve opened
2/15/2011	1:03:36 PM	Bubbler valve opened
2/15/2011	1:03:36 PM	Helium MFC set to  500.000000
2/15/2011	1:03:36 PM	H2 MFC set to  0.000000
2/15/2011	1:03:36 PM	BCl3 MFC set to  0.000000
2/15/2011	1:03:36 PM	PHl3 MFC set to  0.000000
2/15/2011	1:03:36 PM	SiCl4 MFC set to  0.000000
2/15/2011	1:03:36 PM	Bypass solenoid MFC set to  0.000000
2/15/2011	1:03:36 PM	Tube furnace set to 0
2/15/2011	1:03:53 PM	Helium valve closed
2/15/2011	1:03:53 PM	H2 valve closed
2/15/2011	1:03:53 PM	BCl3 valve closed
2/15/2011	1:03:53 PM	PH3 valve closed
2/15/2011	1:03:53 PM	SiCl4 pre valve closed
2/15/2011	1:03:53 PM	SiCl4 post valve closed
2/15/2011	1:03:53 PM	Main Vac valve closed
2/15/2011	1:03:53 PM	Bypass valve closed
2/15/2011	1:03:53 PM	Bubbler valve closed
2/15/2011	1:03:53 PM	Helium MFC set to  0.000000
2/15/2011	1:03:53 PM	H2 MFC set to  0.000000
2/15/2011	1:03:53 PM	BCl3 MFC set to  0.000000
2/15/2011	1:03:53 PM	PHl3 MFC set to  0.000000
2/15/2011	1:03:53 PM	SiCl4 MFC set to  0.000000
2/15/2011	1:03:53 PM	Bypass solenoid MFC set to  0.000000
2/15/2011	1:03:54 PM	Tube furnace set to 0
2/15/2011	1:03:54 PM	Run finished at 1:03 PM
2/15/2011	1:06:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2011	1:06:08 PM	Recipe started at 1:06 PM
2/15/2011	1:06:08 PM	Helium valve closed
2/15/2011	1:06:08 PM	H2 valve closed
2/15/2011	1:06:08 PM	BCl3 valve closed
2/15/2011	1:06:08 PM	PH3 valve closed
2/15/2011	1:06:08 PM	SiCl4 pre valve closed
2/15/2011	1:06:08 PM	SiCl4 post valve closed
2/15/2011	1:06:08 PM	Main Vac valve closed
2/15/2011	1:06:08 PM	Bubbler valve closed
2/15/2011	1:06:08 PM	Bypass valve opened
2/15/2011	1:06:08 PM	Helium MFC set to  0.000000
2/15/2011	1:06:08 PM	H2 MFC set to  0.000000
2/15/2011	1:06:08 PM	BCl3 MFC set to  0.000000
2/15/2011	1:06:08 PM	PHl3 MFC set to  0.000000
2/15/2011	1:06:08 PM	SiCl4 MFC set to  0.000000
2/15/2011	1:06:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2011	1:06:08 PM	Tube furnace set to 0
2/15/2011	1:06:39 PM	Helium valve closed
2/15/2011	1:06:39 PM	H2 valve closed
2/15/2011	1:06:39 PM	BCl3 valve closed
2/15/2011	1:06:39 PM	PH3 valve closed
2/15/2011	1:06:39 PM	SiCl4 pre valve closed
2/15/2011	1:06:39 PM	SiCl4 post valve closed
2/15/2011	1:06:39 PM	Bubbler valve closed
2/15/2011	1:06:39 PM	Main Vac valve opened
2/15/2011	1:06:39 PM	Bypass valve opened
2/15/2011	1:06:39 PM	Helium MFC set to  0.000000
2/15/2011	1:06:39 PM	H2 MFC set to  0.000000
2/15/2011	1:06:39 PM	BCl3 MFC set to  0.000000
2/15/2011	1:06:39 PM	PHl3 MFC set to  0.000000
2/15/2011	1:06:39 PM	SiCl4 MFC set to  0.000000
2/15/2011	1:06:39 PM	Bypass solenoid MFC set to  0.000000
2/15/2011	1:06:39 PM	Tube furnace set to 0
2/15/2011	1:06:40 PM	Run finished at 1:06 PM
2/15/2011	1:06:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
